The AZ is a tube furnace consisting of eight independent heating zones. These zones can be used to generate temperature profiles along the heated length of the furnace.
The tube furnace is based on an F-type tube furnace. The heating elements consist of a CrFeAl alloy also known as APM. The APM wire has a diameter of 5 mm. The exposed CrFeAl heating coil is mounted on a ceramic fibre module creating a robust design. Low mass ceramic fibre insulation stores a minimum amount of heat that provides a high overall efficiency for heating and cooling the furnace.
With eight zones, thick insulation, and highly symmetric winding of the heating elements throughout the entire furnace, a uniformity of better than ± 5 K is achieved. A key advantage of the eight individually controlled zones is the expansion of the uniform length inside the furnace. Additionally, the temperature profi le can be precisely controlled for linear increases, peaks, or other user defined profiles.
One process well suited for the AZ tube furnace is chemical vapor deposition as a temperature gradient can be established in the furnace for evaporation of precursor material at the high temperature end zone and sublimation of the vapor onto the substrate at the cooler temperature end zone.
All zones are individually controlled and monitored with thermocouples. Thermocouples are extended through the insulation and positioned next to the heating elements with 3 m long cables. For additional protection, an independently dedicated thermocouple is attached to an over-temperature controller.
синтез, сублимация, annealing, Изпаряване, растеж на кристали, сушене
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